relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2576/
title: Design and Simulation of Micromachined Gyroscope based on Finite Element Method
creator: Nguyen, Van Thang
creator: Tran, Duc Tan
creator: Chu, Duc Trinh
subject: Electronics and Computer Engineering
description: This paper presents a design, simulation and analysis of a vibratory micromachining gyroscope. The gyroscope structure is based on the driving and sensing proof-mass configuration. The gyroscope dimensions are 1644 µm wide, 1754 µm long, 30µm thickness. The suspended spring consists of two silicon cantilevers of driving-mode and sensing-mode stiffness are 400 N/m and 165 N/m, respectively. Mass of driving proof-mass (including of 0.9408�10E-11 kg sensing proof-mass) is 0.5452�10E-7 kg. The simulated resonance frequency is 13324 Hz. The output signals are calculated based on the simulated vibration results. The structure is investigated with several input angular signals. The sensitivity of proposed structure is 100 mV/rad/s when � changes from 0 to 1.6 rad/s.
date: 2017
type: Article
type: PeerReviewed
format: application/pdf
language: en
identifier: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2576/1/Full%20page_publication_article.pdf
identifier:   Nguyen, Van Thang and Tran, Duc Tan and Chu, Duc Trinh  (2017) Design and Simulation of Micromachined Gyroscope based on Finite Element Method.  VNU Journal of Science: Mathematics - Physics, 33  (3).    ISSN 0866-8612     
relation: https://js.vnu.edu.vn/MaP/article/view/4215