@article{SisLab2619, volume = {51}, month = {September}, title = {Electric Properties and Interface Charge Trap Density of Ferroelectric Gate Thin Film Transistor Using (Bi,La)4Ti3O12/Pb(Zr,Ti)O3 Stacked Gate Insulator}, author = {Van Thanh Pham and Nguyen Quoc Trinh Bui and Miyasako Takaaki and Trong Tue Phan and Tokumitsu Eisuke and Shimoda Tatsuya}, year = {2012}, pages = {09LA09}, journal = {Japanese Journal of Applied Physics, 2014}, url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2619/}, abstract = {We successfully fabricated ferroelectric gate thin film transistors (FGTs) using solution-processed (Bi,La)4Ti3O12 (BLT)/Pb(Zr,Ti)O3 (PZT) stacked films and an indium?tin oxide (ITO) film as ferroelectric gate insulators and an oxide channel, respectively. The typical n-type channel transistors were obtained with the counterclockwise hysteresis loop due to the ferroelectric property of the BLT/PZT stacked gate insulators. These FGTs exhibited good device performance characteristics, such as a high ON/OFF ratio of 106, a large memory window of 1.7?3.1 V, and a large ON current of 0.5?2.5 mA. In order to investigate interface charge trapping for these devices, we applied the conductance method to MFS capacitors, i.e., Pt/ITO/BLT/PZT/Pt capacitors. As a result, the interface charge trap density (Dit) between the ITO and BLT/PZT stacked films was estimated to be in the range of 10?11?10?12 eV?1 cm?2. The small Dit value suggested that good interfaces were achieved.} }