?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Phan%2C+Huu+Phu&rft.aulast=Phan&rft.aufirst=Huu+Phu&rft.issue=1&rft.volume=23&rft.date=January+2017&rft.issn=1432-1858&rft.atitle=Analytical+modeling+of+a+silicon-polymer+electrothermal+microactuator&rft.title=Microsystem+Technologies&rft.pages=101-111&rft.genre=article