@inproceedings{SisLab2899,
       booktitle = {H?i ngh{\d i} V?t l{\'y} Ch?t r?n v{\`a} Khoa h{\d o}c V?t li?u To{\`a}n qu?c ? SPMS 2017},
           month = {October},
           title = {Nghi{\^e}n c?u, ch? t{\d a}o c{\h a}m bi?n t? d?a tr{\^e}n hi?u ?ng hall ph?ng (PHE)},
          author = {Khac Quynh Le and Xuan Toan Nguyen and Dinh Tu Bui and Thi Huong Giang Do and Huu Duc Nguyen},
            year = {2017},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/2899/},
        abstract = {H? c{\'a}c c{\h a}m bi?n {\dj}o t? tr??ng d{\d a}ng ch? th?p v{\`a} d{\d a}ng c?u Wheatstone d?a tr{\^e}n hi?u ?ng Hall ph?ng (PHE), c?u tr{\'u}c v?i m{\`a}ng m{\h o}ng {\dj}?n l?p Ni80Fe20 {\dj}{\~a} {\dj}??c ch{\'u}ng t{\^o}i nghi{\^e}n c?u v{\`a} ch? t{\d a}o d?a tr{\^e}n thi?t b{\d i} ph{\'u}n x{\d a} sputtering ATC-2000FC. C{\'a}c nghi{\^e}n c?u theo h??ng t?i ?u h{\'o}a c?u tr{\'u}c, h{\`i}nh d{\d a}ng c{\h a}m bi?n v?i m{\d u}c {\dj}{\'i}ch t{\u a}ng c??ng {\dj}? nh{\d a}y theo t? tr??ng, bao g?m c{\h a}m bi?n c{\'o} c{\'a}c k{\'i}ch th??c: 3{$\times$}1mm, 5{$\times$}1mm, 10{$\times$}1mm, 10{$\times$}0,5mm, c{\'o} {\dj}? d{\`a}y l?p m{\`a}ng m{\h o}ng t? t{\'i}nh kh{\'a}c nhau 5, 10, 20 nm. K?t qu{\h a} nghi{\^e}n c?u cho th?y, {\dj}? nh{\d a}y c{\h u}a c{\h a}m bi?n ph{\d u} thu?c m{\d a}nh v{\`a}o t{\'i}nh d{\d i} h??ng h{\`i}nh d{\d a}ng v{\`a} b? d{\`a}y c{\h u}a l?p NiFe. T{\'i}nh d{\d i} h??ng h{\`i}nh d{\d a}ng c{\`a}ng l?n, b? d{\`a}y l?p m{\`a}ng NiFe c{\`a}ng m{\h o}ng th{\`i} {\dj}? nh{\d a}y c{\h a}m bi?n c{\`a}ng cao. {\DJ}? nh{\d a}y l?n nh?t {\dj}{\d a}t {\dj}??c tr{\^e}n c{\h a}m bi?n ch? th?p c{\'o} k{\'i}ch th??c 10{$\times$}0,5mm, c{\'o} b? d{\`a}y l?p NiFe 5 nm c{\'o} gi{\'a} tr{\d i} 30 ?V/Oe, t{\d a}i d{\`o}ng c?p 3 mA, t??ng {\dj}??ng v?i {\dj}? nh{\d a}y 10 m?/Oe. V?i qui tr{\`i}nh c{\^o}ng ngh? ch? t{\d a}o {\dj}?n gi{\h a}n, c?u tr{\'u}c m{\`a}ng {\dj}?n l?p nh?ng {\dj}? nh{\d a}y c{\h u}a c{\h a}m bi?n c{\'o} th? so s{\'a}nh {\dj}??c v?i c{\'a}c c{\h a}m bi?n c{\'o} c{\`u}ng lo{\d a}i, c{\`u}ng ch?c n{\u a}ng {\dj}??c ch? t{\d a}o t? m{\`a}ng {\dj}a l?p r?t ph?c t{\d a}p nh? c{\h a}m bi?n c?u tr{\'u}c van ? spin (VS), c{\h a}m bi?n t? {\dj}i?n tr? xuy{\^e}n h?m (TMR) {\dj}{\~a} c{\^o}ng b?.}
}