eprintid: 3001
rev_number: 15
eprint_status: archive
userid: 303
dir: disk0/00/00/30/01
datestamp: 2018-11-24 01:58:46
lastmod: 2018-11-24 01:58:46
status_changed: 2018-11-24 01:58:46
type: conference_item
metadata_visibility: show
creators_name: Hoang, Ha
creators_name: Hori, Tatsuki
creators_name: Yasuda, To-oru
creators_name: Kizu, Takio
creators_name: Tsukagoshi, Kazuhito
creators_name: Nabatame, Toshihide
creators_name: Bui, Nguyen Quoc Trinh
creators_name: Fujiwara, Akihiko
creators_id: trinhbnq@vnu.edu.vn
title: Investigation on solution-processed In-Si-O thin film transistor via spin-coating method
ispublished: pub
subjects: Phys
divisions: fac_physic
abstract: In this work, we have explored optimum fabrication condition by a solution processing method for 3 at.% Si doped indium oxide thin-film transistors (TFTs). In-Si-O (ISO) thin films were investigated by X-ray reflectivity (XRR) and X-ray diffraction (XRD) techniques, and the operation of TFTs were characterized by a conventional three-probe method. XRR results suggested that as the annealing temperature increased, the film thickness decreased. In addition, according to XRD measurement, the ISO film started crystalline from 850 °C regardless the film thickness. The best ISO TFT showed the value of VT of –5 V, µ of 1.32 cm2/Vs, SS of 1 V/dec, and on/off current ratio about 107.
date: 2018
date_type: published
official_url: http://www.amfpd.jp
full_text_status: public
pres_type: paper
event_title: The 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)
event_location: Kyoto, Japan
event_dates: 3-6 July 2018
event_type: conference
refereed: TRUE
citation:   Hoang, Ha and Hori, Tatsuki and Yasuda, To-oru and Kizu, Takio and Tsukagoshi, Kazuhito and Nabatame, Toshihide and Bui, Nguyen Quoc Trinh and Fujiwara, Akihiko  (2018) Investigation on solution-processed In-Si-O thin film transistor via spin-coating method.  In: The 25th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD), 3-6 July 2018, Kyoto, Japan.     
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3001/1/Manuscript_FPD2018.pdf