@techreport{SisLab3040,
           month = {June},
            type = {Technical Report},
           title = {Integrated inductor fabrication by monolithic approach},
          author = {Thi Yen Mai Nguyen},
       publisher = {University of Engineering and Technology, Hanoi},
            year = {2018},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040/},
        abstract = {This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.}
}