?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Adc&rft.relation=https%3A%2F%2Feprints.uet.vnu.edu.vn%2Feprints%2Fid%2Feprint%2F3040%2F&rft.title=Integrated+inductor+fabrication+by+monolithic+approach&rft.creator=Nguyen%2C+Thi+Yen+Mai&rft.subject=Engineering+Physics&rft.description=This+technical+report+will+present+the+experimental+approaches+and+technological+processes+to+realize+the+ferrite-based+micro-inductor.+The+objective+is+to+develop+a+technology+for+fabricating+integrated+micro-inductors+on%2Fin+silicon+based+on+ferrite+as+magnetic+cores.+Copper+is+chosen+for+the+winding+as+top+tracks%2C+bottom+tracks+and+vias.+Electro-deposition+technology+is+used+for+copper+deposition.&rft.publisher=University+of+Engineering+and+Technology%2C+Hanoi&rft.date=2018-06-12&rft.type=Technical+Report&rft.type=NonPeerReviewed&rft.format=application%2Fmsword&rft.language=en&rft.identifier=https%3A%2F%2Feprints.uet.vnu.edu.vn%2Feprints%2Fid%2Feprint%2F3040%2F1%2Ftechnical%2520report%2520Y%2520Mai%25202018.docx&rft.identifier=++Nguyen%2C+Thi+Yen+Mai++(2018)+Integrated+inductor+fabrication+by+monolithic+approach.++Technical+Report.+University+of+Engineering+and+Technology%2C+Hanoi.+++++