relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040/
title: Integrated inductor fabrication by monolithic approach
creator: Nguyen, Thi Yen Mai
subject: Engineering Physics
description: This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.
publisher: University of Engineering and Technology, Hanoi
date: 2018-06-12
type: Technical Report
type: NonPeerReviewed
format: application/msword
language: en
identifier: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040/1/technical%20report%20Y%20Mai%202018.docx
identifier:   Nguyen, Thi Yen Mai  (2018) Integrated inductor fabrication by monolithic approach.  Technical Report. University of Engineering and Technology, Hanoi.