%0 Report
%9 Technical Report
%A Nguyen, Thi Yen Mai
%D 2018
%F SisLab:3040
%T Integrated inductor fabrication by monolithic approach
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040/
%X This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.