TY  - RPRT
ID  - SisLab3040
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040/
A1  - Nguyen, Thi Yen Mai
Y1  - 2018/06/12/
N2  - This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.
PB  - University of Engineering and Technology, Hanoi
M1  - technical_report
TI  - Integrated inductor fabrication by monolithic approach
AV  - public
ER  -