%A Thi Yen Mai Nguyen
%T Integrated inductor fabrication by monolithic approach
%X This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.
%D 2018
%I University of Engineering and Technology, Hanoi
%L SisLab3040