eprintid: 3040
rev_number: 20
eprint_status: archive
userid: 388
dir: disk0/00/00/30/40
datestamp: 2018-07-06 02:56:40
lastmod: 2018-07-06 02:56:40
status_changed: 2018-07-06 02:56:40
type: monograph
metadata_visibility: show
creators_name: Nguyen, Thi Yen Mai
creators_id: mainty85@gmail.com
title: Integrated inductor fabrication by monolithic approach
ispublished: pub
subjects: Phys
divisions: fac_physic
abstract: This technical report will present the experimental approaches and technological processes to realize the ferrite-based micro-inductor. The objective is to develop a technology for fabricating integrated micro-inductors on/in silicon based on ferrite as magnetic cores. Copper is chosen for the winding as top tracks, bottom tracks and vias. Electro-deposition technology is used for copper deposition.
date: 2018-06-12
date_type: published
publisher: University of Engineering and Technology, Hanoi
full_text_status: public
monograph_type: technical_report
citation:   Nguyen, Thi Yen Mai  (2018) Integrated inductor fabrication by monolithic approach.  Technical Report. University of Engineering and Technology, Hanoi.     
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3040/1/technical%20report%20Y%20Mai%202018.docx