@article{SisLab3089,
          volume = {61},
          number = {9A},
          author = {Yen Mai Nguyen and Magali Brunet},
           title = {Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer},
       publisher = {Tr??ng {\DJ}{\d a}i h{\d o}c S? ph{\d a}m H{\`a} n?i},
            year = {2016},
         journal = {Journal of Science of HNUE},
             doi = {DOI: 10.18173/2354-1059.2016-0080},
           pages = {54--59},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3089/},
        abstract = {In this work, the technology for fabricating integrated micro-inductors onto silicon is
developed. The paper will report the experimental process and technology development to
fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.
Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is
chosen for depositing copper. Via is electro-deposited to make the connection between bottom
tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or
commercial ferrite films.}
}