relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3089/
title: Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer
creator: Nguyen, Yen Mai
creator: Brunet, Magali
subject: Engineering Physics
description: In this work, the technology for fabricating integrated micro-inductors onto silicon is  developed. The paper will report the experimental process and technology development to  fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.  Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is  chosen for depositing copper. Via is electro-deposited to make the connection between bottom  tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or  commercial ferrite films.
publisher: Trường Đại học Sư phạm Hà nội
date: 2016
type: Article
type: PeerReviewed
format: application/pdf
language: en
identifier: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3089/1/08%20Yen%20Mai%20Nguyen.pdf
identifier:   Nguyen, Yen Mai and Brunet, Magali  (2016) Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer.  Journal of Science of HNUE, 61  (9A).   pp. 54-59.  ISSN 2354-1059     
relation: http://english.hnue.edu.vn/Research
relation: DOI: 10.18173/2354-1059.2016-0080