%0 Journal Article
%@ 2354-1059
%A Nguyen, Yen Mai
%A Brunet, Magali
%D 2016
%F SisLab:3089
%I Trường Đại học Sư phạm Hà nội
%J Journal of Science of HNUE
%N 9A
%P 54-59
%T Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3089/
%V 61
%X In this work, the technology for fabricating integrated micro-inductors onto silicon is  developed. The paper will report the experimental process and technology development to  fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.  Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is  chosen for depositing copper. Via is electro-deposited to make the connection between bottom  tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or  commercial ferrite films.