<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer"^^ . "In this work, the technology for fabricating integrated micro-inductors onto silicon is\r\ndeveloped. The paper will report the experimental process and technology development to\r\nfabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.\r\nCopper is used for the fabrication of the conductor windings and vias. Electro-deposition is\r\nchosen for depositing copper. Via is electro-deposited to make the connection between bottom\r\ntracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or\r\ncommercial ferrite films."^^ . "2016" . . "61" . "9A" . . "Trường Đại học Sư phạm Hà nội"^^ . . . "Journal of Science of HNUE"^^ . . . "23541059" . . . . . . . . . . "Yen Mai"^^ . "Nguyen"^^ . "Yen Mai Nguyen"^^ . . "Magali"^^ . "Brunet"^^ . "Magali Brunet"^^ . . . . . . "Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer (PDF)"^^ . . . "08 Yen Mai Nguyen.pdf"^^ . . "HTML Summary of #3089 \n\nFabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer\n\n" . "text/html" . . . "Engineering Physics" . .