TY  - JOUR
ID  - SisLab3089
UR  - http://english.hnue.edu.vn/Research
IS  - 9A
A1  - Nguyen, Yen Mai
A1  - Brunet, Magali
Y1  - 2016///
N2  - In this work, the technology for fabricating integrated micro-inductors onto silicon is
developed. The paper will report the experimental process and technology development to
fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.
Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is
chosen for depositing copper. Via is electro-deposited to make the connection between bottom
tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or
commercial ferrite films.
PB  - Tr??ng ??i h?c S? ph?m Hà n?i
JF  - Journal of Science of HNUE
VL  - 61
SN  - 2354-1059
TI  - Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer
SP  - 54
AV  - public
EP  - 59
ER  -