%A Yen Mai Nguyen
%A Magali Brunet
%J Journal of Science of HNUE
%T Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer
%X In this work, the technology for fabricating integrated micro-inductors onto silicon is
developed. The paper will report the experimental process and technology development to
fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.
Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is
chosen for depositing copper. Via is electro-deposited to make the connection between bottom
tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or
commercial ferrite films.
%N 9A
%P 54-59
%V 61
%D 2016
%I Trường Đại học Sư phạm Hà nội
%R DOI: 10.18173/2354-1059.2016-0080
%L SisLab3089