eprintid: 3089
rev_number: 7
eprint_status: archive
userid: 388
dir: disk0/00/00/30/89
datestamp: 2018-10-09 09:58:45
lastmod: 2018-10-09 09:58:45
status_changed: 2018-10-09 09:58:45
type: article
metadata_visibility: show
creators_name: Nguyen, Yen Mai
creators_name: Brunet, Magali
creators_id: mainty85@gmail.com
title: Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer
ispublished: pub
subjects: Phys
divisions: fac_physic
abstract: In this work, the technology for fabricating integrated micro-inductors onto silicon is
developed. The paper will report the experimental process and technology development to
fabricate the micro-inductor on-to silicon substrates with the hybrid integration approach.
Copper is used for the fabrication of the conductor windings and vias. Electro-deposition is
chosen for depositing copper. Via is electro-deposited to make the connection between bottom
tracks and top tracks. The ferrite core is fabricated and sintered from in-house ferrites or
commercial ferrite films.
date: 2016
date_type: published
publisher: Trường Đại học Sư phạm Hà nội
official_url: http://english.hnue.edu.vn/Research
id_number: DOI: 10.18173/2354-1059.2016-0080
contact_email: mainty85@gmail.com
full_text_status: public
publication: Journal of Science of HNUE
volume: 61
number: 9A
pagerange: 54-59
refereed: TRUE
issn: 2354-1059
funders: French RENATECH network
projects: PRIIM project
citation:   Nguyen, Yen Mai and Brunet, Magali  (2016) Fabrication of Ferrite-Based Integrated Micro-Inductors onto Silicon Wafer.  Journal of Science of HNUE, 61  (9A).   pp. 54-59.  ISSN 2354-1059     
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3089/1/08%20Yen%20Mai%20Nguyen.pdf