@inproceedings{SisLab3516,
       booktitle = {The 9th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY},
           title = {Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si},
          author = {Thi Ngoc Nguyen and G. Agnus and S. Matzen and T. Maroutian and Thi Huong Giang Do and P. Lecoeur},
            year = {2018},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3516/},
        abstract = {Magnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field  detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials,  which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic  field range less than 0.2 T, the sensor?s sensitivity as high as 250 Hz/T and 487 Hz/T  were achieved  in vacuum environments of ? and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of  micro-ME-sensors for sensing magnetic field.}
}