<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si"^^ . "Magnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials, which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic field range less than 0.2 T, the sensor’s sensitivity as high as 250 Hz/T and 487 Hz/T were achieved in vacuum environments of … and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of micro-ME-sensors for sensing magnetic field."^^ . "2018" . . . . . . . . . . . . . . . . . . . . . . . "G."^^ . "Agnus"^^ . "G. Agnus"^^ . . "Thi Huong Giang"^^ . "Do"^^ . "Thi Huong Giang Do"^^ . . "T."^^ . "Maroutian"^^ . "T. Maroutian"^^ . . "Thi Ngoc"^^ . "Nguyen"^^ . "Thi Ngoc Nguyen"^^ . . "P."^^ . "Lecoeur"^^ . "P. Lecoeur"^^ . . "S."^^ . "Matzen"^^ . "S. Matzen"^^ . . . . "The 9th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY"^^ . . . . . "Ninh Binh City, Vietnam"^^ . . . . . . "Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si (Microsoft Word)"^^ . . . "Nguyen Thi Ngoc_IWAMSN2018_form_Abstract.doc"^^ . . . "Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si (Other)"^^ . . . . . . "indexcodes.txt"^^ . . "HTML Summary of #3516 \n\nResonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si\n\n" . "text/html" . . . "Engineering Physics" . .