TY  - CONF
ID  - SisLab3516
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3516/
A1  - Nguyen, Thi Ngoc
A1  - Agnus, G.
A1  - Matzen, S.
A1  - Maroutian, T.
A1  - Do, Thi Huong Giang
A1  - Lecoeur, P.
Y1  - 2018///
N2  - Magnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field  detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials,  which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic  field range less than 0.2 T, the sensor?s sensitivity as high as 250 Hz/T and 487 Hz/T  were achieved  in vacuum environments of ? and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of  micro-ME-sensors for sensing magnetic field.
TI  - Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si
M2  - Ninh Binh City, Vietnam
AV  - public
T2  - The 9th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY
ER  -