%A Thi Ngoc Nguyen
%A G. Agnus
%A S. Matzen
%A T. Maroutian
%A Thi Huong Giang Do
%A P. Lecoeur
%T Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si
%X Magnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field  detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials,  which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic  field range less than 0.2 T, the sensor’s sensitivity as high as 250 Hz/T and 487 Hz/T  were achieved  in vacuum environments of … and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of  micro-ME-sensors for sensing magnetic field.
%C Ninh Binh City, Vietnam
%D 2018
%L SisLab3516