eprintid: 3516
rev_number: 9
eprint_status: archive
userid: 16
dir: disk0/00/00/35/16
datestamp: 2019-06-20 22:40:12
lastmod: 2019-06-24 06:45:13
status_changed: 2019-06-20 22:40:12
type: conference_item
metadata_visibility: show
creators_name: Nguyen, Thi Ngoc
creators_name: Agnus, G.
creators_name: Matzen, S.
creators_name: Maroutian, T.
creators_name: Do, Thi Huong Giang
creators_name: Lecoeur, P.
creators_id: giangdth@vnu.edu.vn
title: Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si
ispublished: pub
subjects: Phys
divisions: fac_physic
abstract: Magnetoelectric (ME)-based sensors have been demonstrated as a promising alternative for the magnetic field  detection with high sensitivity on the order of a few tens of nanoteslas [1,2]. To date, most applications focus on laminated composites of using bulk piezoelectric (PZT) materials,  which is a critical limit for miniaturizinginto micrometer-sized devices.This work shows the first attempts of a resonator based on multi-ferroic PZT/TbFeCo multilayers, where magnetic signal was very sensed by the shift of the resonant frequency. In this device, TbFeCo layer acts as a micro-actuator, while the PZT thin film as a micro-sensor. In magnetic  field range less than 0.2 T, the sensor’s sensitivity as high as 250 Hz/T and 487 Hz/T  were achieved  in vacuum environments of … and 5 mbar, respectively). A smaller size and lower power consumption provide a significant advantages in terms of  micro-ME-sensors for sensing magnetic field.
date: 2018
date_type: published
full_text_status: public
pres_type: speech
event_title: The 9th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY
event_location: Ninh Binh City, Vietnam
event_dates: 7-11 November 2018
event_type: workshop
refereed: TRUE
citation:   Nguyen, Thi Ngoc and Agnus, G. and Matzen, S. and Maroutian, T. and Do, Thi Huong Giang and Lecoeur, P.  (2018) Resonator for magnetic sensor applications based on the magnetoelectric thin film integrated on Si.  In: The 9th International Workshop on ADVANCED MATERIALS SCIENCE AND NANOTECHNOLOGY, 7-11 November 2018, Ninh Binh City, Vietnam.     
document_url: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3516/1/Nguyen%20Thi%20Ngoc_IWAMSN2018_form_Abstract.doc