%0 Conference Paper
%A Vu, Quoc Tuan
%A Bui, Thanh Tung
%A Chu, Duc Trinh
%B The 7th International Workshop on Nanotechnology and Application (IWNA 2019)
%C Phan Thiet
%D 2019
%F SisLab:3845
%T A study on electrical parameters of interdigitated array electrodes (IDEAS) sensor for concentration measurement of phosphate-buffered saline
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/3845/
%X Capacitive sensors based on interdigitated array electrodes (IDAEs) integrated into microfluidic channels have been developed for many bioanalysis applications due to its advantages in comparison with electrochemical sensors. In this study, an IDEAs capacitive sensor has been proposed, fabricated and  characterized. The IDEA structure is fabricated in a 100 μm-width microfluidic channel using  micromachining technology. Electrical impedance spectroscopy measurements of the sensor have been carried out in a wide frequency range from 10 kHz to 1 MHz. Performance of the IDEAs sensor has been demostrated through sensing the concentration of the phosphate buffer saline (PBS) which is fully filled  in the microchannel. The obtained results show a linear relationship between the measured conductance and concentration of PBS solution, demonstrating the possibility of estimating conductance of the solution through the total impedance.