@inproceedings{SisLab411,
       booktitle = {2006: The SAFE \& ProRISC},
           title = {Study on 2-lever DRIE for 3D MEMS structures},
          author = {J. Wei and Duc-Trinh Chu and PM Sarro},
            year = {2006},
           pages = {494--497},
         journal = {Proceedings of the SAFE \& ProRISC},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/}
}