?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Abook&rft.au=Wei%2C+J.&rft.aulast=Wei&rft.aufirst=J.&rft.date=2006&rft.title=Study+on+2-lever+DRIE+for+3D+MEMS+structures&rft.genre=proceeding