relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/
title: Study on 2-lever DRIE for 3D MEMS structures
creator: Wei, J.
creator: Chu, Duc-Trinh
creator: Sarro, PM
subject: Electronics and Communications
date: 2006
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Wei, J. and Chu, Duc-Trinh and Sarro, PM  (2006) Study on 2-lever DRIE for 3D MEMS structures.  In: 2006: The SAFE & ProRISC.