%0 Conference Paper
%A Wei, J.
%A Chu, Duc-Trinh
%A Sarro, PM
%B 2006: The SAFE & ProRISC
%D 2006
%F SisLab:411
%P 494-497
%T Study on 2-lever DRIE for 3D MEMS structures
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/