<> <http://www.w3.org/2000/01/rdf-schema#comment> "The repository administrator has not yet configured an RDF license."^^<http://www.w3.org/2001/XMLSchema#string> .
<> <http://xmlns.com/foaf/0.1/primaryTopic> <http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://purl.org/ontology/bibo/AcademicArticle> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://purl.org/ontology/bibo/Article> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/title> "Study on 2-lever DRIE for 3D MEMS structures"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/date> "2006" .
<http://eprints.uet.vnu.edu.vn/eprints/id/publication/ext-5a26852ee46f9227614212dbfe6cd8b9> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://purl.org/ontology/bibo/Collection> .
<http://eprints.uet.vnu.edu.vn/eprints/id/publication/ext-5a26852ee46f9227614212dbfe6cd8b9> <http://xmlns.com/foaf/0.1/name> "Proceedings of the SAFE & ProRISC"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/isPartOf> <http://eprints.uet.vnu.edu.vn/eprints/id/publication/ext-5a26852ee46f9227614212dbfe6cd8b9> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/ontology/bibo/status> <http://purl.org/ontology/bibo/status/peerReviewed> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/ontology/bibo/status> <http://purl.org/ontology/bibo/status/published> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/creator> <http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-adaf227eb6c1ec078e6e0c658b733473> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/ontology/bibo/authorList> <http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411#authors> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411#authors> <http://www.w3.org/1999/02/22-rdf-syntax-ns#_1> <http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-adaf227eb6c1ec078e6e0c658b733473> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/creator> <http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-trinhcd@vnu.edu.vn> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/ontology/bibo/authorList> <http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411#authors> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411#authors> <http://www.w3.org/1999/02/22-rdf-syntax-ns#_2> <http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-trinhcd@vnu.edu.vn> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/creator> <http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-b23e34ac36deb60cf39f7de45ab5a0af> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/ontology/bibo/authorList> <http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411#authors> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411#authors> <http://www.w3.org/1999/02/22-rdf-syntax-ns#_3> <http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-b23e34ac36deb60cf39f7de45ab5a0af> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-trinhcd@vnu.edu.vn> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://xmlns.com/foaf/0.1/Person> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-trinhcd@vnu.edu.vn> <http://xmlns.com/foaf/0.1/givenName> "Duc-Trinh"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-trinhcd@vnu.edu.vn> <http://xmlns.com/foaf/0.1/familyName> "Chu"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-trinhcd@vnu.edu.vn> <http://xmlns.com/foaf/0.1/name> "Duc-Trinh Chu"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-b23e34ac36deb60cf39f7de45ab5a0af> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://xmlns.com/foaf/0.1/Person> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-b23e34ac36deb60cf39f7de45ab5a0af> <http://xmlns.com/foaf/0.1/givenName> "PM"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-b23e34ac36deb60cf39f7de45ab5a0af> <http://xmlns.com/foaf/0.1/familyName> "Sarro"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-b23e34ac36deb60cf39f7de45ab5a0af> <http://xmlns.com/foaf/0.1/name> "PM Sarro"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-adaf227eb6c1ec078e6e0c658b733473> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://xmlns.com/foaf/0.1/Person> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-adaf227eb6c1ec078e6e0c658b733473> <http://xmlns.com/foaf/0.1/givenName> "J."^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-adaf227eb6c1ec078e6e0c658b733473> <http://xmlns.com/foaf/0.1/familyName> "Wei"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/person/ext-adaf227eb6c1ec078e6e0c658b733473> <http://xmlns.com/foaf/0.1/name> "J. Wei"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://purl.org/ontology/bibo/Article> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/ontology/bibo/presentedAt> <http://eprints.uet.vnu.edu.vn/eprints/id/event/ext-c30f0f0401f9986c9418215104b9da2a> .
<http://eprints.uet.vnu.edu.vn/eprints/id/event/ext-c30f0f0401f9986c9418215104b9da2a> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://purl.org/ontology/bibo/Conference> .
<http://eprints.uet.vnu.edu.vn/eprints/id/event/ext-c30f0f0401f9986c9418215104b9da2a> <http://purl.org/dc/terms/title> "2006: The SAFE & ProRISC"^^<http://www.w3.org/2001/XMLSchema#string> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://eprints.org/ontology/EPrint> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://eprints.org/ontology/ConferenceItemEPrint> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/isPartOf> <http://eprints.uet.vnu.edu.vn/eprints/id/repository> .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://www.w3.org/2000/01/rdf-schema#seeAlso> <https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/> .
<https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/> <http://purl.org/dc/elements/1.1/title> "HTML Summary of #411 \n\nStudy on 2-lever DRIE for 3D MEMS structures\n\n" .
<https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/> <http://purl.org/dc/elements/1.1/format> "text/html" .
<https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/> <http://xmlns.com/foaf/0.1/primaryTopic> <http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> .
<http://eprints.uet.vnu.edu.vn/eprints/id/subject/ECE> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.w3.org/2004/02/skos/core#Concept> .
<http://eprints.uet.vnu.edu.vn/eprints/id/subject/ECE> <http://www.w3.org/2004/02/skos/core#prefLabel> "Electronics and Communications"@en .
<http://eprints.uet.vnu.edu.vn/eprints/id/eprint/411> <http://purl.org/dc/terms/subject> <http://eprints.uet.vnu.edu.vn/eprints/id/subject/ECE> .