TY  - CONF
ID  - SisLab411
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/411/
A1  - Wei, J.
A1  - Chu, Duc-Trinh
A1  - Sarro, PM
Y1  - 2006///
TI  - Study on 2-lever DRIE for 3D MEMS structures
SP  - 494
AV  - none
EP  - 497
T2  - 2006: The SAFE & ProRISC
ER  -