eprintid: 411
rev_number: 11
eprint_status: archive
userid: 4
dir: disk0/00/00/04/11
datestamp: 2015-04-03 16:21:59
lastmod: 2017-12-12 13:59:05
status_changed: 2017-12-12 13:59:05
type: conference_item
metadata_visibility: show
creators_name: Wei, J.
creators_name: Chu, Duc-Trinh
creators_name: Sarro, PM
creators_id: trinhcd@vnu.edu.vn
title: Study on 2-lever DRIE for 3D MEMS structures
ispublished: pub
subjects: ECE
divisions: fac_fet
date: 2006
date_type: published
full_text_status: none
pres_type: paper
publication: Proceedings of the SAFE & ProRISC
pagerange: 494-497
event_title: 2006: The SAFE & ProRISC
event_type: conference
refereed: TRUE
citation:   Wei, J. and Chu, Duc-Trinh and Sarro, PM  (2006) Study on 2-lever DRIE for 3D MEMS structures.  In: 2006: The SAFE & ProRISC.