@inproceedings{SisLab412,
       booktitle = {The SAFE \& Prorisc},
           title = {Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle},
          author = {J. Wei and Duc-Trinh Chu and M. van der Velden and PM Sarro},
            year = {2007},
           pages = {625--628},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/412/}
}