relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/412/
title: Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
creator: Wei, J.
creator: Chu, Duc-Trinh
creator: van der Velden, M.
creator: Sarro, PM
subject: Electronics and Communications
date: 2007
type: Conference or Workshop Item
type: PeerReviewed
identifier:   Wei, J. and Chu, Duc-Trinh and van der Velden, M. and Sarro, PM  (2007) Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle.  In: The SAFE & Prorisc.