%0 Conference Paper
%A Wei, J.
%A Chu, Duc-Trinh
%A van der Velden, M.
%A Sarro, PM
%B The SAFE & Prorisc
%D 2007
%F SisLab:412
%P 625-628
%T Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/412/