<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle"^^ . "2007" . . . . . . . . . . . . . . . . "M."^^ . "van der Velden"^^ . "M. van der Velden"^^ . . "PM"^^ . "Sarro"^^ . "PM Sarro"^^ . . "Duc-Trinh"^^ . "Chu"^^ . "Duc-Trinh Chu"^^ . . "J."^^ . "Wei"^^ . "J. Wei"^^ . . . . "The SAFE & Prorisc"^^ . . . . . "HTML Summary of #412 \n\nTuning of DRIE process for Capacitive Sensor in Inkjet Nozzle\n\n" . "text/html" . . . "Electronics and Communications"@en . .