TY  - CONF
ID  - SisLab412
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/412/
A1  - Wei, J.
A1  - Chu, Duc-Trinh
A1  - van der Velden, M.
A1  - Sarro, PM
Y1  - 2007///
TI  - Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
SP  - 625
AV  - none
EP  - 628
T2  - The SAFE & Prorisc
ER  -