eprintid: 412
rev_number: 12
eprint_status: archive
userid: 4
dir: disk0/00/00/04/12
datestamp: 2015-05-06 03:13:26
lastmod: 2017-12-12 13:59:10
status_changed: 2017-12-12 13:59:10
type: conference_item
metadata_visibility: show
creators_name: Wei, J.
creators_name: Chu, Duc-Trinh
creators_name: van der Velden, M.
creators_name: Sarro, PM
creators_id: trinhcd@vnu.edu.vn
title: Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle
ispublished: pub
subjects: ECE
divisions: fac_fet
date: 2007
full_text_status: none
pres_type: paper
pagerange: 625-628
event_title: The SAFE & Prorisc
event_type: conference
refereed: TRUE
citation:   Wei, J. and Chu, Duc-Trinh and van der Velden, M. and Sarro, PM  (2007) Tuning of DRIE process for Capacitive Sensor in Inkjet Nozzle.  In: The SAFE & Prorisc.