eprintid: 4138 rev_number: 6 eprint_status: archive userid: 270 dir: disk0/00/00/41/38 datestamp: 2020-12-08 09:29:25 lastmod: 2020-12-08 09:29:25 status_changed: 2020-12-08 09:29:25 type: article metadata_visibility: show creators_name: Nguyen, Minh Hoang creators_name: Bui, Thanh Tung creators_id: hoang.photonics@gmail.com creators_id: tungbt@vnu.edu.vn title: Electrostatic modulation of a photonic crystal resonant filter ispublished: pub subjects: ElectronicsandComputerEngineering subjects: isi divisions: cetr_uet divisions: fac_fet abstract: We demonstrate continuous and reversible spectral modulation of a photonic crystal cavity resonant mode using electrostatic force. The design and simulation of an H0 cavity were done using finite-element analysis methods. Fabrication of the sample device was done in a cleanroom using state-of-the-art nanotechnologies that are compatible with fabrication techniques for complementary metal-oxide semiconductors and microelectromechanical systems. Upon the change of the applied bias voltage, the resonant tuning effect is quantitatively demonstrated. Furthermore, the dynamic response of the transmission output intensity with respect to the oscillating applied voltage is demonstrated. date: 2020-05 date_type: published official_url: http://dx.doi.org/10.1117/1.JNP.14.026014 id_number: 10.1117/1.JNP.14.026014 full_text_status: none publication: Journal of Nanophotonics volume: 14 number: 02 pagerange: 1 refereed: TRUE issn: 1934-2608 citation: Nguyen, Minh Hoang and Bui, Thanh Tung (2020) Electrostatic modulation of a photonic crystal resonant filter. Journal of Nanophotonics, 14 (02). p. 1. ISSN 1934-2608