@article{SisLab4156,
          number = {10},
           title = {H? th?ng vi c? {\dj}i?n t? MEMS v{\`a} ?ng d{\d u}ng},
          author = {Ngoc An Nguyen and Van Ngoc Tran and Dinh Tiep Dang and Quang Loc Do and Thi Thuy Ha Tran and Dac Hai Nguyen and Van The Vu and Nhu Cuong Nguyen and Ngoc Thao Pham and Thanh Tung Bui and Duc Trinh Chu},
       publisher = {Vi?n KHCNQS},
            year = {2020},
           pages = {478--486},
         journal = {T{\d A}P CH{\'I} NGHI{\^E}N C?U KHOA H{\d O}C V{\`A} C{\^O}NG NGH? QU{\^A}N S?},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/4156/},
        abstract = {B{\'a}o c{\'a}o n{\`a}y tr{\`i}nh b{\`a}y t?ng quan v? vi c? {\dj}i?n t? MEMS, m?t l{\~i}nh v?c
khoa h{\d o}c li{\^e}n ng{\`a}nh d?a tr{\^e}n n?n t{\h a}ng c{\h u}a ng{\`a}nh vi {\dj}i?n t? v{\`a} vi ch? t{\d a}o. C{\'a}c linh ki?n MEMS hi?n nay {\dj}??c s? d{\d u}ng r?ng r{\~a}i trong x{\~a} h?i nh? c{\'a}m bi?n gia t?c, c{\h a}m bi?n g{\'o}c, c{\h a}m bi?n {\'a}p xu?t, c{\h a}m bi?n sinh h{\d o}c,... B{\'a}o c{\'a}o c{\~u}ng tr{\`i}nh b{\`a}y t{\'o}m t?t m?t s? {\dj}{\d i}nh h??ng nghi{\^e}n c?u c{\h u}a nh{\'o}m nghi{\^e}n c?u Vi c? {\dj}i?n t? v{\`a} vi h? th?ng, t{\d a}i Khoa {\DJ}i?n t?- Vi?n th{\^o}ng, Tr??ng {\DJ}{\d a}i h{\d o}c C{\^o}ng ngh?, {\DJ}{\d a}i h{\d o}c Qu?c gia H{\`a} n?i.}
}