@article{SisLab832,
          number = {95},
           title = {Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining},
          author = {Quang Long Nguyen and Manh Hoang Chu and Duc Trinh Chu and Ngoc Hung Vu},
       publisher = {Vietnam National University Hanoi},
            year = {2013},
           pages = {177--181},
         journal = {VNU Journal of Science},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/832/}
}