?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.au=Nguyen%2C+Quang+Long&rft.aulast=Nguyen&rft.aufirst=Quang+Long&rft.issue=95&rft.date=2013&rft.issn=0866-8612&rft.atitle=Capacitive+Type+Z-axis+Accelerometer+Fabricated+by+Silicon+on+Insulator+Micromachining&rft.title=VNU+Journal+of+Science&rft.pages=177-181&rft.genre=article