relation: https://eprints.uet.vnu.edu.vn/eprints/id/eprint/832/
title: Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining
creator: Nguyen, Quang Long
creator: Chu, Manh Hoang
creator: Chu, Duc Trinh
creator: Vu, Ngoc Hung
subject: Electronics and Communications
publisher: Vietnam National University Hanoi
date: 2013
type: Article
type: PeerReviewed
identifier:   Nguyen, Quang Long and Chu, Manh Hoang and Chu, Duc Trinh and Vu, Ngoc Hung  (2013) Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining.  VNU Journal of Science  (95).   pp. 177-181.  ISSN 0866-8612