%0 Journal Article
%@ 0866-8612
%A Nguyen, Quang Long
%A Chu, Manh Hoang
%A Chu, Duc Trinh
%A Vu, Ngoc Hung
%D 2013
%F SisLab:832
%I Vietnam National University Hanoi
%J VNU Journal of Science
%N 95
%P 177-181
%T Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining
%U https://eprints.uet.vnu.edu.vn/eprints/id/eprint/832/