<> "The repository administrator has not yet configured an RDF license."^^ . <> . . . "Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining"^^ . "2013" . "95" . . "Vietnam National University Hanoi"^^ . . . "VNU Journal of Science"^^ . . . "08668612" . . . . . . . . . . . . . . . . "Duc Trinh"^^ . "Chu"^^ . "Duc Trinh Chu"^^ . . "Ngoc Hung"^^ . "Vu"^^ . "Ngoc Hung Vu"^^ . . "Manh Hoang"^^ . "Chu"^^ . "Manh Hoang Chu"^^ . . "Quang Long"^^ . "Nguyen"^^ . "Quang Long Nguyen"^^ . . . . . "HTML Summary of #832 \n\nCapacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining\n\n" . "text/html" . . . "Electronics and Communications"@en . .