TY  - JOUR
ID  - SisLab832
UR  - https://eprints.uet.vnu.edu.vn/eprints/id/eprint/832/
IS  - 95
A1  - Nguyen, Quang Long
A1  - Chu, Manh Hoang
A1  - Chu, Duc Trinh
A1  - Vu, Ngoc Hung
Y1  - 2013///
PB  - Vietnam National University Hanoi
JF  - VNU Journal of Science
SN  - 0866-8612
TI  - Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining
SP  - 177
AV  - none
EP  - 181
ER  -