%A Quang Long Nguyen
%A Manh Hoang Chu
%A Duc Trinh Chu
%A Ngoc Hung Vu
%J VNU Journal of Science
%T Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining
%N 95
%P 177-181
%D 2013
%I Vietnam National University Hanoi
%L SisLab832