eprintid: 832
rev_number: 10
eprint_status: archive
userid: 5
dir: disk0/00/00/08/32
datestamp: 2016-05-21 06:14:45
lastmod: 2016-05-21 06:16:26
status_changed: 2016-05-21 06:14:45
type: article
metadata_visibility: show
creators_name: Nguyen, Quang Long
creators_name: Chu, Manh Hoang
creators_name: Chu, Duc Trinh
creators_name: Vu, Ngoc Hung
creators_id: trinhcd@vnu.edu.vn
title: Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining
ispublished: pub
subjects: ECE
divisions: fac_fet
date: 2013
date_type: published
publisher: Vietnam National University Hanoi
full_text_status: none
publication: VNU Journal of Science
number: 95
pagerange: 177-181
refereed: TRUE
issn: 0866-8612
citation:   Nguyen, Quang Long and Chu, Manh Hoang and Chu, Duc Trinh and Vu, Ngoc Hung  (2013) Capacitive Type Z-axis Accelerometer Fabricated by Silicon on Insulator Micromachining.  VNU Journal of Science  (95).   pp. 177-181.  ISSN 0866-8612