TY - JOUR ID - SisLab837 UR - http://dx.doi.org/10.7567/JJAP.52.04CB08 IS - 4S A1 - Bui, Thanh Tung A1 - Suzuki, Motohiro A1 - Kato, Fumiki A1 - Nemoto, Shunsuke A1 - Watanabe, Naoki A1 - Aoyagi, Masahiro Y1 - 2013/04// JF - Japanese Journal of Applied Physics VL - 52 SN - 0021-4922 TI - Sub-Micron-Accuracy Gold-to-Gold Interconnection Flip-Chip Bonding Approach for Electronics?Optics Heterogeneous Integration AV - none ER -