@article{SisLab838,
          volume = {23},
          number = {7},
           month = {July},
          author = {Van Thanh Dau and Thanh Tung Bui and Xuan Thien Dinh and Viet Dzung Dao and Takeo Yamada and Kenji Hata and Susumu Sugiyama},
           title = {A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator},
       publisher = {IOP Publishing},
            year = {2013},
         journal = {Journal of Micromechanics and Microengineering},
           pages = {075024},
             url = {https://eprints.uet.vnu.edu.vn/eprints/id/eprint/838/}
}